T P, Ragesh Kumar; Hari, Sangeetha; Damodaran, Krishna Kumar; Ingólfsson, Oddur; Hagen, Cornelis W
(Beilstein Institut, 2017-11-10)
We present first experiments on electron beam induced deposition of silacyclohexane (SCH) and dichlorosilacyclohexane (DCSCH) under a focused high-energy electron beam (FEBID). We compare the deposition dynamics observed when growing pillars of high ...