The aim of this work is to explore the role of electronegativity and the electron power absorption mechanism in electronegative capacitively coupled oxygen and chlorine discharges. The fundamental mechanisms underlying the electron heating and the ...

Focused electron beam induced deposition (FEBID) is a direct-write 3D nanofabrication technique, which works on the principle of electron-induced molecular decomposition. In FEBID, a high-energy focused electron beam dissociates the precursor molecules ...