Kateb, Movaffaq; Hajihosein, Hamid; Gudmundsson, Jon Tomas; Ingvarsson, Snorri
(University of Iceland, 2020)
We demonstrate the effect of ionization flux fraction on the epitaxial growth of Cu film on Cu (111) substrate at room temperature. We compare thermal evaporation, dc magnetron sputtering (dcMS) and high power impulse magnetron sputtering (HiPIMS) with ...