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Browsing Greinar- HÍ by Author "Þorsteinsson, Davíð Örn"

Browsing Greinar- HÍ by Author "Þorsteinsson, Davíð Örn"

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    Growth of HfN thin films by reactive high power impulse magnetron sputtering 
    Þorsteinsson, Davíð Örn; Gudmundsson, Jon Tomas (AIP Publishing, 2018-03)
    Thin hafnium nitride films were grown on SiO2 by reactive high power impulse magnetron sputtering (HiPIMS) and reactive direct current magnetron sputtering (dcMS). The conditions during growth were kept similar and the film properties were compared as ...