Khosa, Rabia Yasmin; Þorsteinsson, Einar Baldur; Winters, M.; Rorsman, N.; Karhu, R.; Hassan, J.; Sveinbjörnsson, Einar
(AIP Publishing, 2018-02)
We report on the electrical properties of Al2O3 films grown on 4H-SiC by successive thermal oxidation of thin Al layers at low temperatures (200°C - 300°C). MOS capacitors made using these films contain lower density of interface traps, are more immune ...