Titill: | Germanium coated silicon nanowires as human respiratory sensing device |
Höfundur: |
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Útgáfa: | 2022-10-12 |
Tungumál: | Enska |
Háskóli/Stofnun: | Reykjavik University Háskólinn í Reykjavík University of Iceland Háskóli Íslands |
Svið: | School of Technology (RU) Tæknisvið (HR) Science Institute (UI) Raunvísindastofnun (HÍ) |
Deild: | Department of Engineering (RU) Verkfræðideild (HR) |
DOI: | 10.1109/CAS56377.2022.9934678 |
Efnisorð: | Silicon nanowire arrays; MACE; Air flow sensor; Humidity sensors; Scanning electron microscopy; X-ray scattering; X-ray diffraction; Germanium; Silicon; Etching; Nanótækni; Kísill; Smásjár; Rafeindafræði; Röntgentækni; Geislafræði; German (frumefni) |
URI: | https://hdl.handle.net/20.500.11815/4555 |
Tilvitnun:E. Fakhri, M. T. Sultan, A. Manolescu, S. Ingvarsson and H. G. Svavarsson, "Germanium coated silicon nanowires as human respiratory sensing device," 2022 International Semiconductor Conference (CAS), Poiana Brasov, Romania, 2022, pp. 163-166, doi: 10.1109/CAS56377.2022.9934678.
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Útdráttur:We report on germanium coated silicon nanowires structures synthesized with metal assisted chemical etching and qualify their functionality as human respiratory sensor. The
sensors were made from p-type single-crystalline (100) silicon wafers using a silver catalyzed top-down etching, afterwards coated by 50 nm germanium thin layer using a magnetron
sputtering. The germanium post-treatment was performed by
rapid thermal annealing at 450 and 700◦C. The sensors were
characterized by X-ray diffraction diffractogram and scanning
electron microscopy. It is demonstrated that the sensors are
highly sensitive as human breath detectors, with rapid response
and frequency detectability. They are also shown to be a good
candidate for human respiratory disease diagnoses.
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Athugasemdir:Post-print (lokagerð höfundar)
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Leyfi:Post-print (lokaútgáfa höfundar)
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