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Germanium coated silicon nanowires as human respiratory sensing device

Germanium coated silicon nanowires as human respiratory sensing device

Title: Germanium coated silicon nanowires as human respiratory sensing device
Author: Aghabalaei Fakhri, Elham   orcid.org/0000-0002-8771-2005
Sultan, Muhammad Taha
Manolescu, Andrei   orcid.org/0000-0002-0713-4664
Ingvarsson, Snorri   orcid.org/0000-0001-8397-8917
Svavarsson, Halldor   orcid.org/0000-0002-1729-4098
Date: 2022-10-12
Language: English
University/Institute: Reykjavik University
Háskólinn í Reykjavík
University of Iceland
Háskóli Íslands
School: School of Technology (RU)
Tæknisvið (HR)
Science Institute (UI)
Raunvísindastofnun (HÍ)
Department: Department of Engineering (RU)
Verkfræðideild (HR)
DOI: 10.1109/CAS56377.2022.9934678
Subject: Silicon nanowire arrays; MACE; Air flow sensor; Humidity sensors; Scanning electron microscopy; X-ray scattering; X-ray diffraction; Germanium; Silicon; Etching; Nanótækni; Kísill; Smásjár; Rafeindafræði; Röntgentækni; Geislafræði; German (frumefni)
URI: https://hdl.handle.net/20.500.11815/4555

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E. Fakhri, M. T. Sultan, A. Manolescu, S. Ingvarsson and H. G. Svavarsson, "Germanium coated silicon nanowires as human respiratory sensing device," 2022 International Semiconductor Conference (CAS), Poiana Brasov, Romania, 2022, pp. 163-166, doi: 10.1109/CAS56377.2022.9934678.


We report on germanium coated silicon nanowires structures synthesized with metal assisted chemical etching and qualify their functionality as human respiratory sensor. The sensors were made from p-type single-crystalline (100) silicon wafers using a silver catalyzed top-down etching, afterwards coated by 50 nm germanium thin layer using a magnetron sputtering. The germanium post-treatment was performed by rapid thermal annealing at 450 and 700◦C. The sensors were characterized by X-ray diffraction diffractogram and scanning electron microscopy. It is demonstrated that the sensors are highly sensitive as human breath detectors, with rapid response and frequency detectability. They are also shown to be a good candidate for human respiratory disease diagnoses.


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