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Germanium coated silicon nanowires as human respiratory sensing device

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dc.contributor Reykjavik University
dc.contributor Háskólinn í Reykjavík
dc.contributor University of Iceland
dc.contributor Háskóli Íslands
dc.contributor.author Aghabalaei Fakhri, Elham
dc.contributor.author Sultan, Muhammad Taha
dc.contributor.author Manolescu, Andrei
dc.contributor.author Ingvarsson, Snorri
dc.contributor.author Svavarsson, Halldor
dc.date.accessioned 2023-11-20T15:15:41Z
dc.date.available 2023-11-20T15:15:41Z
dc.date.issued 2022-10-12
dc.identifier.citation E. Fakhri, M. T. Sultan, A. Manolescu, S. Ingvarsson and H. G. Svavarsson, "Germanium coated silicon nanowires as human respiratory sensing device," 2022 International Semiconductor Conference (CAS), Poiana Brasov, Romania, 2022, pp. 163-166, doi: 10.1109/CAS56377.2022.9934678.
dc.identifier.uri https://hdl.handle.net/20.500.11815/4555
dc.description Post-print (lokagerð höfundar)
dc.description.abstract We report on germanium coated silicon nanowires structures synthesized with metal assisted chemical etching and qualify their functionality as human respiratory sensor. The sensors were made from p-type single-crystalline (100) silicon wafers using a silver catalyzed top-down etching, afterwards coated by 50 nm germanium thin layer using a magnetron sputtering. The germanium post-treatment was performed by rapid thermal annealing at 450 and 700◦C. The sensors were characterized by X-ray diffraction diffractogram and scanning electron microscopy. It is demonstrated that the sensors are highly sensitive as human breath detectors, with rapid response and frequency detectability. They are also shown to be a good candidate for human respiratory disease diagnoses.
dc.description.sponsorship This work was supported by Reykjavik University Ph.D. fund no. 220006 and the Icelandic Research Fund Grant no. 218029-051. We are grateful to Rodica Plugaru and Neculai Plugaru for discussions.
dc.language.iso en
dc.publisher IEEE
dc.rights info:eu-repo/semantics/openAccess
dc.subject Silicon nanowire arrays
dc.subject MACE
dc.subject Air flow sensor
dc.subject Humidity sensors
dc.subject Scanning electron microscopy
dc.subject X-ray scattering
dc.subject X-ray diffraction
dc.subject Germanium
dc.subject Silicon
dc.subject Etching
dc.subject Nanótækni
dc.subject Kísill
dc.subject Smásjár
dc.subject Rafeindafræði
dc.subject Röntgentækni
dc.subject Geislafræði
dc.subject German (frumefni)
dc.title Germanium coated silicon nanowires as human respiratory sensing device
dc.type info:eu-repo/semantics/conferenceObject
dcterms.license Post-print (lokaútgáfa höfundar)
dc.description.version Peer reviewe
dc.identifier.journal 2022 International Semiconductor Conference (CAS)
dc.identifier.doi 10.1109/CAS56377.2022.9934678
dc.relation.url http://xplorestaging.ieee.org/ielx7/9933917/9933992/09934678.pdf?arnumber=9934678
dc.contributor.department Department of Engineering (RU)
dc.contributor.department Verkfræðideild (HR)
dc.contributor.school School of Technology (RU)
dc.contributor.school Tæknisvið (HR)
dc.contributor.school Science Institute (UI)
dc.contributor.school Raunvísindastofnun (HÍ)

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