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Study of the transition from self-organised to homogeneous plasma distribution in chromium HiPIMS discharge

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dc.contributor Háskóli Íslands
dc.contributor University of Iceland
dc.contributor.author Šlapanská, M
dc.contributor.author Hecimovic, A
dc.contributor.author Gudmundsson, Jon Tomas
dc.contributor.author Hnilica, J
dc.contributor.author Breilmann, W
dc.contributor.author Vašina, P
dc.contributor.author von Keudell, A
dc.date.accessioned 2021-02-01T14:17:32Z
dc.date.available 2021-02-01T14:17:32Z
dc.date.issued 2020-02-07
dc.identifier.citation Šlapanská, M., Hnilica, A., Vašina, J., Hecimovic, W., Breilmann, P., Von Keudell, & Gudmundsson. (2020). Study of the transition from self-organised to homogeneous plasma distribution in chromium HiPIMS discharge. Journal of Physics D: Applied Physics, 53(15), 10.
dc.identifier.issn 0022-3727
dc.identifier.issn 1361-6463 (eISSN)
dc.identifier.uri https://hdl.handle.net/20.500.11815/2441
dc.description Publisher's version (útgefin grein)
dc.description.abstract The self-organised plasma patterns, known as spokes or ionisation zones in magnetron sputtering discharges, were observed in a wide range of power densities, from low power direct current magnetron sputtering (dcMS) discharge to high power impulse magnetron sputtering (HiPIMS) discharge. For some target materials and non-reactive gases, it was observed that at very high power densities (>3 kW cm-2) the plasma exhibits a transition from a regime where spokes are observed to a homogeneous plasma regime. In this contribution, we present a comparison of plasma properties: plasma emission (optical emission spectroscopy) and flux of argon and chromium ions (mass spectrometry), measured both in the spoke regime and in the homogeneous plasma regime, aimed to expand the understanding of the plasma transition between the two modes. A simple biased flat probe was used to distinguish between the spoke regime and the homogeneous plasma regime. It was found that the flux of multiply charged ions (Ar2+, Cr2+, Cr3+, Cr4+) increases abruptly at the transition between the spoke regime and the homogeneous plasma regime. Similarly, the emission from Cr+ ions exhibits a strong increase of about 50% when the plasma torus becomes homogeneous. These observations are interpreted as an increase in electron temperature and a change in the electron heating mode, from a combination of secondary electron heating and Ohmic heating towards pure Ohmic heating. The transition to the homogeneous plasma regime and pure Ohmic heating is only observed in non-reactive HiPIMS discharges for target atoms with the second ionisation potential higher than the first ionisation potential of Ar (15.76 eV), and a self-sputter yield larger than 1.
dc.description.sponsorship This research has been supported by project LM2018097 funded by the Ministry of Education, Youth and Sports of the Czech Republic and project GA19-00579S funded by the Czech Science Foundation. This work has been supported by the German Science Foundation (DFG) within the frame of the collaborative research centre SFB-TR 87
dc.format.extent 155201
dc.language.iso en
dc.publisher IOP Publishing
dc.relation.ispartofseries Journal of Physics D: Applied Physics;53(15)
dc.rights info:eu-repo/semantics/openAccess
dc.subject Chromium
dc.subject HiPIMS
dc.subject Mass spectrometry
dc.subject Ohmic heating
dc.subject Optical emission spectroscopy
dc.subject Spokes
dc.subject Litrófsgreining
dc.subject Króm
dc.title Study of the transition from self-organised to homogeneous plasma distribution in chromium HiPIMS discharge
dc.type info:eu-repo/semantics/article
dcterms.license Original content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI
dc.description.version Peer Reviewed
dc.identifier.journal Journal of Physics D: Applied Physics
dc.identifier.doi 10.1088/1361-6463/ab6a8c
dc.relation.url https://iopscience.iop.org/article/10.1088/1361-6463/ab6a8c
dc.contributor.department Raunvísindastofnun (HÍ)
dc.contributor.department Science Institute (UI)
dc.contributor.school Verkfræði- og náttúruvísindasvið (HÍ)
dc.contributor.school School of Engineering and Natural Sciences (UI)

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