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Browsing by Subject "High-power impulse magnetron sputtering (HiPIMS)"

Browsing by Subject "High-power impulse magnetron sputtering (HiPIMS)"

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    Fabrication and characterization of Si1−xGex nanocrystals in as-grown and annealed structures: a comparative study 
    Sultan, Muhammad Taha; Maraloiu, Adrian Valentin; Stavarache, Ionel; Gudmundsson, Jon Tomas; Manolescu, Andrei; Teodorescu, Valentin Serban; Ciurea, Magdalena Lidia; Svavarsson, Halldor (Beilstein Institut, 2019-09-17)
    Multilayer structures comprising of SiO2/SiGe/SiO2 and containing SiGe nanoparticles were obtained by depositing SiO2 layers using reactive direct current magnetron sputtering (dcMS), whereas, Si and Ge were co-sputtered using dcMS and high-power impulse ...
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    Oblique angle deposition of nickel thin films by high-power impulse magnetron sputtering 
    Hajihoseini, Hamidreza; Kateb, Movaffaq; Ingvarsson, Snorri; Gudmundsson, Jon Tomas (Beilstein Institut, 2019-09-20)
    Background: Oblique angle deposition is known for yielding the growth of columnar grains that are tilted in the direction of the deposition flux. Using this technique combined with high-power impulse magnetron sputtering (HiPIMS) can induce unique ...