Shih, Po-Yuan; Tafrishi, Reza; Cipriani, Maicol; Hermanns, Christian Felix; Oster, Jens; Gölzhäuser, Armin; Edinger, Klaus; Ingólfsson, Oddur
(Royal Society of Chemistry (RSC), 2022-03-30)
Motivated by the use of tetrakis(dimethylamino)silane (TKDMAS) to produce silicon nitride-based deposits and its potential as a precursor for Focused Electron Beam Induced Deposition (FEBID), we have studied its reactivity towards low energy electrons ...