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Browsing by Author "c9dbb308-aad9-4a04-8b3f-c08bb8e3534f"
Now showing items 1-9 of 9
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(AIP Publishing, 2019-03-08)We investigate the effect of atomic ordering on the magnetic anisotropy of Ni80Fe20 at.% (Py). To this end, Py films were grown epitaxially on MgO(001) using dc magnetron sputtering (dcMS) and high power impulse magnetron sputtering (HiPIMS). Aside ... -
(Beilstein Institut, 2019-09-17)Multilayer structures comprising of SiO2/SiGe/SiO2 and containing SiGe nanoparticles were obtained by depositing SiO2 layers using reactive direct current magnetron sputtering (dcMS), whereas, Si and Ge were co-sputtered using dcMS and high-power impulse ...
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(AIP Publishing, 2018-03)Thin hafnium nitride films were grown on SiO2 by reactive high power impulse magnetron sputtering (HiPIMS) and reactive direct current magnetron sputtering (dcMS). The conditions during growth were kept similar and the film properties were compared as ...
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(University of Iceland, 2020)We demonstrate the effect of ionization flux fraction on the epitaxial growth of Cu film on Cu (111) substrate at room temperature. We compare thermal evaporation, dc magnetron sputtering (dcMS) and high power impulse magnetron sputtering (HiPIMS) with ...
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(MDPI AG, 2018-11-28)The one-dimensional object-oriented particle-in-cell Monte Carlo collision code oopd1 is applied to explore the role of secondary electron emission and electron reflection on the properties of the capacitively-coupled oxygen discharge. At low pressure ...
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(Beilstein Institut, 2019-09-20)Background: Oblique angle deposition is known for yielding the growth of columnar grains that are tilted in the direction of the deposition flux. Using this technique combined with high-power impulse magnetron sputtering (HiPIMS) can induce unique ...
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(IOP Publishing, 2017-03-27)We apply particle-in-cell simulations with Monte Carlo collisions to study the influence of the singlet metastable states on the ion energy distribution in single and dual frequency capacitively coupled oxygen discharges. For this purpose, the ...
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(IOP Publishing, 2020-02-07)The self-organised plasma patterns, known as spokes or ionisation zones in magnetron sputtering discharges, were observed in a wide range of power densities, from low power direct current magnetron sputtering (dcMS) discharge to high power impulse ...
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(2020)We studied high power impulse magnetron sputtering (HiPIMS) and different substrate bias for the epitaxial growth of Cu film on Cu (111) substrate by molecular dynamics simulation. We assumed a fully ionized deposition flux to represent the high ...
Now showing items 1-9 of 9