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Browsing by Author "Þorsteinsson, Einar Baldur"

Browsing by Author "Þorsteinsson, Einar Baldur"

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  • Khosa, Rabia Yasmin; Þorsteinsson, Einar Baldur; Winters, M.; Rorsman, N.; Karhu, R.; Hassan, J.; Sveinbjörnsson, Einar Örn (AIP Publishing, 2018-02)
    We report on the electrical properties of Al2O3 films grown on 4H-SiC by successive thermal oxidation of thin Al layers at low temperatures (200°C - 300°C). MOS capacitors made using these films contain lower density of interface traps, are more immune ...