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Fletta eftir efnisorði "Surface Roughness"
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(University of Iceland, 2020)We demonstrate the effect of ionization flux fraction on the epitaxial growth of Cu film on Cu (111) substrate at room temperature. We compare thermal evaporation, dc magnetron sputtering (dcMS) and high power impulse magnetron sputtering (HiPIMS) with ... -
(2020)We studied high power impulse magnetron sputtering (HiPIMS) and different substrate bias for the epitaxial growth of Cu film on Cu (111) substrate by molecular dynamics simulation. We assumed a fully ionized deposition flux to represent the high ...
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