Browsing by Subject "HiPIMS"

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The importance of HiPIMS ionization flux fraction on the film microstructure and surface roughness: A molecular dynamic simulation

Kateb, Movaffaq; Hajihosein, Hamid; Gudmundsson, Jon Tomas; Ingvarsson, Snorri (University of Iceland, 2020)

We demonstrate the eﬀect of ionization ﬂux fraction on the epitaxial growth of Cu ﬁlm on Cu (111) substrate at room temperature. We compare thermal evaporation, dc magnetron sputtering (dcMS) and high power impulse magnetron sputtering (HiPIMS) with ...
Study of the transition from self-organised to homogeneous plasma distribution in chromium HiPIMS discharge

Šlapanská, M; Hecimovic, A; Gudmundsson, Jon Tomas; Hnilica, J; Breilmann, W; Vašina, P; von Keudell, A (IOP Publishing, 2020-02-07)

The self-organised plasma patterns, known as spokes or ionisation zones in magnetron sputtering discharges, were observed in a wide range of power densities, from low power direct current magnetron sputtering (dcMS) discharge to high power impulse ...
Tailoring microstructure and stress through energetic ion bombardment: A molecular dynamic simulation

Kateb, Movaffaq; Gudmundsson, Jon Tomas; Ingvarsson, Snorri (2020)

We studied high power impulse magnetron sputtering (HiPIMS) and different substrate bias for the epitaxial growth of Cu film on Cu (111) substrate by molecular dynamics simulation. We assumed a fully ionized deposition flux to represent the high ...

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