Hajihoseini, Hamidreza; Kateb, Movaffaq; Ingvarsson, Snorri; Gudmundsson, Jon Tomas
(Beilstein Institut, 2019-09-20)
Background: Oblique angle deposition is known for yielding the growth of columnar grains that are tilted in the direction of the deposition flux. Using this technique combined with high-power impulse magnetron sputtering (HiPIMS) can induce unique ...