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Dissociative ionization and electron beam induced deposition of tetrakis(dimethylamino)silane, a precursor for silicon nitride deposition

Shih, Po-Yuan; Tafrishi, Reza; Cipriani, Maicol; Hermanns, Christian Felix; Oster, Jens; Gölzhäuser, Armin; Edinger, Klaus; Ingólfsson, Oddur (Royal Society of Chemistry (RSC), 2022-03-30)

Motivated by the use of tetrakis(dimethylamino)silane (TKDMAS) to produce silicon nitride-based deposits and its potential as a precursor for Focused Electron Beam Induced Deposition (FEBID), we have studied its reactivity towards low energy electrons ...
Low energy electron-induced reactions of model compounds for nano-scale fabrication and for application in chemoradiotherapy

Cipriani, Maicol (2022-06-16)

The interaction of low-energy electrons (LEEs) with neutral molecules plays an important role in various applications. In focused electron beam induced deposition (FEBID), a direct-write 3D nanofabrication technique, a high-energy focused electron beam ...

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