Browsing by Subject "Ionization Flux Fraction"

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The importance of HiPIMS ionization flux fraction on the film microstructure and surface roughness: A molecular dynamic simulation

Kateb, Movaffaq; Hajihosein, Hamid; Gudmundsson, Jon Tomas; Ingvarsson, Snorri (University of Iceland, 2020)

We demonstrate the eﬀect of ionization ﬂux fraction on the epitaxial growth of Cu ﬁlm on Cu (111) substrate at room temperature. We compare thermal evaporation, dc magnetron sputtering (dcMS) and high power impulse magnetron sputtering (HiPIMS) with ...

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