Browsing by Subject "Electron molecule interactions"

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Low-energy electron-induced decomposition of bimetallic and silicon-containing FEBID precursors: HFeCo3(CO)12, H2FeRu3(CO)13, SiC5H10Cl2, SiC5H12 and Si3C3H12

T P, Ragesh Kumar (University of Iceland, School of Engineering and Natural Sciences, Faculty of Physical Sciences, 2017-12-15)

Focused electron beam induced deposition (FEBID) is a direct-write 3D nanofabrication technique, which works on the principle of electron-induced molecular decomposition. In FEBID, a high-energy focused electron beam dissociates the precursor molecules ...

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