Browsing by Journal title "Journal of Physics D: Applied Physics"

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On singlet metastable states, ion flux and ion energy in single and dual frequency capacitively coupled oxygen discharges

Hannesdottir, Holmfridur; Gudmundsson, Jon Tomas (IOP Publishing, 2017-03-27)

We apply particle-in-cell simulations with Monte Carlo collisions to study the influence of the singlet metastable states on the ion energy distribution in single and dual frequency capacitively coupled oxygen discharges. For this purpose, the ...
Study of the transition from self-organised to homogeneous plasma distribution in chromium HiPIMS discharge

Šlapanská, M; Hecimovic, A; Gudmundsson, Jon Tomas; Hnilica, J; Breilmann, W; Vašina, P; von Keudell, A (IOP Publishing, 2020-02-07)

The self-organised plasma patterns, known as spokes or ionisation zones in magnetron sputtering discharges, were observed in a wide range of power densities, from low power direct current magnetron sputtering (dcMS) discharge to high power impulse ...

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