Šlapanská, M; Hecimovic, A; Gudmundsson, Jon Tomas; Hnilica, J; Breilmann, W; Vašina, P; von Keudell, A
(IOP Publishing, 2020-02-07)
The self-organised plasma patterns, known as spokes or ionisation zones in magnetron sputtering discharges, were observed in a wide range of power densities, from low power direct current magnetron sputtering (dcMS) discharge to high power impulse ...