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Browsing Háskóli Íslands by Journal title "Materials Science in Semiconductor Processing"

Browsing Háskóli Íslands by Journal title "Materials Science in Semiconductor Processing"

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    Electrical characterization of high k-dielectrics for 4H-SiC MIS devices 
    Khosa, Rabia Yasmin; Chen, J.T.; Winters, M.; Pálsson, Kjartan; Karhu, R.; Hassan, J.; Rorsman, N.; Sveinbjörnsson, Einar (Elsevier BV, 2019-08-01)
    We report promising results regarding the possible use of AlN or Al 2 O 3 as a gate dielectric in 4H-SiC MISFETs. The crystalline AlN films are grown by hot wall metal organic chemical vapor deposition (MOCVD) at 1100 °C. The amorphous Al 2 O 3 films ...