Þorsteinsson, Davíð Örn; Gudmundsson, Jon Tomas
(AIP Publishing, 2018-03)
Thin hafnium nitride films were grown on SiO2 by reactive high power impulse magnetron sputtering (HiPIMS) and reactive direct current magnetron sputtering (dcMS). The conditions during growth were kept similar and the film properties were compared as ...