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Fletta eftir titli tímarits "Journal of Physics D: Applied Physics"
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Fletta eftir titli tímarits "Journal of Physics D: Applied Physics"
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(IOP Publishing, 2017-03-27)We apply particle-in-cell simulations with Monte Carlo collisions to study the influence of the singlet metastable states on the ion energy distribution in single and dual frequency capacitively coupled oxygen discharges. For this purpose, the ... -
(IOP Publishing, 2020-02-07)The self-organised plasma patterns, known as spokes or ionisation zones in magnetron sputtering discharges, were observed in a wide range of power densities, from low power direct current magnetron sputtering (dcMS) discharge to high power impulse ...
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