Aghabalaei Fakhri, Elham; Sultan, Muhammad Taha; Manolescu, Andrei; Ingvarsson, Snorri; Svavarsson, Halldor
(IEEE, 2022-10-12)
We report on germanium coated silicon nanowires structures synthesized with metal assisted chemical etching and qualify their functionality as human respiratory sensor. The
sensors were made from p-type single-crystalline (100) silicon wafers using a ...